Title: Semiconductor Materials and Process Technology Handbook (VLSI and ULSI)
Publisher: Noyes Publications
Publication Date: 1989
Language: English
ISBN 10: 0815511507
ISBN 13: 9780815511502
Binding: hardcover
Condition: new

About this title

Synopsis

This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.

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