Silicon Processing for the VLSI Era, Vol. 2: Process Integration

Tauber, Richard N.,Wolf, Stanley

ISBN 10: 0961672145 / ISBN 13: 9780961672140

Published by Lattice Pr, 1990

About this Item

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Bibliographic Details

• Title: Silicon Processing for the VLSI Era, Vol. 2: Process Integration
• Publisher: Lattice Pr
• Publication Date: 1990
• Language: English
• ISBN 10: 0961672145
• ISBN 13: 9780961672140
• Binding: Hardcover
• Edition: 5th or later Edition
• Condition: Good

About this title

Synopsis

The companion volumes to this book are Volume 1- Process Technology and Volume 3- The Submicron MOSFET