Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices
Hilleringmann, Ulrich
ISBN 10: 3658410426 ISBN 13: 9783658410421
Published by Springer Vieweg, 2023
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Soft cover
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The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer's view.
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Bibliographic Details
Title: Silicon Semiconductor Technology: Processing...
Publisher: Springer Vieweg
Publication Date: 2023
Binding: Soft cover
Condition: New
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Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices
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Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices
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Silicon Semiconductor Technology | Processing and Integration of Microelectronic Devices
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ISBN 10: 365841040X
ISBN 13: 9783658410407
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Taschenbuch. Condition: Neu. Silicon Semiconductor Technology | Processing and Integration of Microelectronic Devices | Ulrich Hilleringmann | Taschenbuch | xi | Englisch | 2023 | Springer Fachmedien Wiesbaden | EAN 9783658410407 | Verantwortliche Person für die EU: Springer Vieweg in Springer Science + Business Media, Abraham-Lincoln-Str. 46, 65189 Wiesbaden, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu. Seller Inventory # 126667411
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Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices
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Silicon Semiconductor Technology : Processing and Integration of Microelectronic Devices
Published by
Springer Fachmedien Wiesbaden, 2023
ISBN 10: 365841040X
ISBN 13: 9783658410407
New
Taschenbuch
Seller: AHA-BUCH GmbH, Einbeck, Germany
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Taschenbuch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching,doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includesmodern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer's view. Seller Inventory # 9783658410407
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Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices
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Brand new book. Fast ship. Please provide full street address as we are not able to ship to P O box address. Seller Inventory # SHAK275761
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Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices
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Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices
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Brand new book. Fast ship. Please provide full street address as we are not able to ship to P O box address. Seller Inventory # SHAK302246