Silicon VLSI Technology: Fundamentals, Practice and Modeling

Plummer, James D.; Deal, Michael; Griffin, Peter B.

ISBN 10: 0130850373 / ISBN 13: 9780130850379

Published by Pearson College Div, 2000

About this Item

A few sentences have been underlined, otherwise in great shape. Well packaged and promptly shipped from California. US veteran operated. Seller Inventory # 1LAGBP001VDF

Bibliographic Details

Title: Silicon VLSI Technology: Fundamentals, ...

Publisher: Pearson College Div

Publication Date: 2000

Binding: Hardcover

Condition: Good

About this title

Synopsis:

Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies. Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing--Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal...

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