Sputtering by Particle Bombardment III : Characteristics of Sputtered Particles, Technical Applications

Language: English

Published by Springer Berlin Heidelberg, 2014

3662311046 / 9783662311042

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Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH

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Druck auf Anfrage Neuware - Printed after ordering - Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering.

Seller Inventory # 9783662311042

Title
Sputtering by Particle Bombardment III : Characteristics of Sputtered Particles, Technical Applications
Author
Klaus Wittmaack
Publisher
Springer Berlin Heidelberg
Publication year
2014
Condition
Neu
Binding
Taschenbuch
Language
English
ISBN 10
3662311046
ISBN 13
9783662311042
Item weight
657 grams
Dimensions
235x155x24 mm

AHA-BUCH GmbH

Einbeck, Germany

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AbeBooks seller since August 14, 2006

Shipping rates from Germany to U.S.A.

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