Title: Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications (Karlsruher Schriftenreihe zur . M. . M. Noe, Prof. Dr. rer. nat. M. Siegel)
Publisher: KIT Scientific Publishing
Publication Date: 2013
Language: English
ISBN 10: 3731501228
ISBN 13: 9783731501220
Binding: Soft cover
Condition: New

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Synopsis

Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-�m lateral dimensions, aiding the realization of sophisticated Josephson devices such as SQUIDs, flux-flow oscillators and long Josephson junctions with artificial phase discontinuities, are presented in detail.

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