Surface Chemical Cleaning and Passivation for Semiconductor Processing: Symposium Held April 13-15, 1993, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)
Higashi, Greg S.; Irene, Eugene A.
ISBN 10:
1558992138 ISBN 13:
9781558992139
Published by Materials Research Society, 1994
Language: English
Condition: Used - Very good
Hardcover
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