Das Buch vermittelt die Grundlagen zur Herstellung und dem Aufbau von Mikrosystemen. Es kann in zwei Teile aufgeteilt werden. Der Schwerpunkt von Teil I liegt hierbei auf den Mikrofertigungsprozessen und behandelt die Siliziumtechnologie, mikromechanische Strukturierungs- (anisotropes �tzen, DRIE) und Bondprozesse (Eutectic Bonding, Fusion Bonding). Teil II behandelt die Aufbau- und Verbindungstechnik f�r Mikrosysteme und vermittelt Kenntnisse zu den Prinzipien der Chipmontage. Dabei stehen u.a. die Beschichtungstechnologien (Metallisierungssysteme) und Kontaktiertechnologien (L�ten, Kleben, Bonden) im Vordergrund.

About the Author

Ha Duong Ngo ist seit 2012 Professor f�r Mikrosystemtechnik und Mikrosensorik an der Hochschule f�r Technik und Wirtschaft Berlin. Von 2015 bis 2021 war er Gruppenleiter Mikrosensorik am Fraunhofer Institut IZM Berlin. Davor war er Oberingenieur an der Technische Universit�t Berlin auf dem Gebiet Mikrosensor/Mikroaktuatorik und Referent Technologie bei Firma Schott AG.

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