Through-Silicon Vias in SiGe BiCMOS and Interposer Technologies for Sub-THz Applications

Matthias Wietstruck

ISBN 10: 3961001960 / ISBN 13: 9783961001965

Published by Universitätsverlag Chemnitz

About this Item

This item is printed on demand - it takes 3-4 days longer - Neuware -In the dissertation 'Through-Silicon Vias in SiGe BiCMOS and Interposer Technologies for sub-THz Applications', a through-silicon via (TSV) technology module is developed targeting high frequency packaging applications in the millimeter-wave and sub-THz frequency range.Based on a high-performance 130 nm SiGe BiCMOS technology, TSVs are embedded in a via-middle integration approach. The TSV process module consists of the TSV integration, a carrier wafer handling and a wafer backside process to realize a redistribution layer. A process flow was developed to realize TSV structures with various geometries to ensure a high TSV design flexibility. The TSV process module can be applied for SiGe BiCMOS as well as for interposer technologies.High-performance TSV interconnections have been simulated to optimize their electrical properties. TSVs were electrically characterized and 3D transitions with low insertion loss <1 dB up to 300 GHz have been demonstrated thus providing excellent RF performance up to sub-THz frequencies.Different application areas like RF grounding, interposers with integrated waveguides as well as 300 GHz antennas are demonstrated. The potential of millimeter-wave packaging and 3D integration was evaluated.In this work, the use of TSVs for the millimeter wave and sub-THz frequency range was demonstrated. This opens up new possibilities for system integration and packaging of ultra-high frequency systems. 210 pp. Englisch.

Seller Inventory # 9783961001965

Bibliographic Details

• Title: Through-Silicon Vias in SiGe BiCMOS and Interposer Technologies for Sub-THz Applications
• Publisher: Universitätsverlag Chemnitz
• Language: English
• ISBN 10: 3961001960
• ISBN 13: 9783961001965
• Binding: Taschenbuch
• Condition: Neu
• Dimensions: 210W x 148H x 32D millimeters 210 millimeters width by 148 millimeters height by 32 millimeters depth
• Weight: 320 grams