Computer simulation of semiconductor processing equipment and devices requires the use of a wide variety of numerical methods. Of these methods, the Monte Carlo approach is perhaps most fundamentally suited to mod� eling physical events occurring on microscopic scales which are intricately connected to the particle structure of nature. Here physical phenomena can be simulated by following simulation particles (such as electrons, molecules, photons, etc. ) through a statistical sampling of scattering events. Monte Carlo is, however, generally looked on as a last resort due to the extremely slow convergence of these methods. It is of interest, then, to examine when in microelectronics it is necessary to use Monte Carlo methods, how such methods may be improved, and what are the alternatives. This book ad� dresses three general areas of simulation which frequently arise in semicon� ductor modeling where Monte Carlo methods playa significant role. In the first chapter the basic mathematical theory of the Boltzmann equation for particle transport is presented. The following chapters are devoted to the modeling of the transport processes and the associated Monte Carlo meth� ods. Specific examples of industrial applications illustrate the effectiveness and importance of these methods. Two of these areas concern simulation of physical particles which may be assigned a time dependent position and velocity. This includes the molecules of a dilute gas used in such processing equipment as chemi� cal vapor decomposition reactors and sputtering reactors. We also consider charged particles moving within a semiconductor lattice.

"About this title" may belong to another edition of this title.

Store Description

Visit Seller's Storefront

Seller's business information

RAREWAVES.COM LIMITED
Elsley Court, 20-22 Great Titchfield Street, London, W1W 8BE, United Kingdom

Sale & Shipping Terms

Terms of Sale

Shipping Terms

Please note that we do not offer Priority shipping to any country.

We currently do not ship to the below countries:

Russia
Belarus
Ukraine
Israel

Please do not attempt to place orders with any of these countries as a ship to address - they will be cancelled.

Shipping rates from United Kingdom to U.S.A.

Shipping rates from United Kingdom to U.S.A.
Order quantity	15 to 20 business days	15 to 20 business days
First item	US$ 0.00	US$ 0.00

Delivery times are set by sellers and vary by carrier and location. Orders passing through Customs may face delays and buyers are responsible for any associated duties or fees. Sellers may contact you regarding additional charges to cover any increased costs to ship your items.