Ultra Clean Processing of Semiconductor Surfaces IX: Ucpss 2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces . September 22-24, 2008 (Solid State Phenomena)

ISBN 10: 3908451647 / ISBN 13: 9783908451648

Published by Trans Tech Pubn, 2009

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Bibliographic Details

• Title: Ultra Clean Processing of Semiconductor Surfaces IX: Ucpss 2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces . September 22-24, 2008 (Solid State Phenomena)
• Publisher: Trans Tech Pubn
• Publication Date: 2009
• Language: English
• ISBN 10: 3908451647
• ISBN 13: 9783908451648
• Binding: Paperback
• Condition: Like New
• Book Type: book

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Synopsis

Volume is indexed by Thomson Reuters CPCI-S (WoS).The contents of this publication include every conceivable issue related to contamination, cleaning and surface preparation during mainstream large-scale integrated circuit manufacture. Typically, silicon is used as the main semiconductor substrate. However, other semiconducting materials such as SiGe and SiC are currently being used in the source-sink junction areas, and materials such as Ge and III-V compounds are being considered for the transistor channel region of future-generation devices.