Updates in Advanced Lithography

Language: English

Published by Intechopen Jul 2013, 2013

9535111752 / 9789535111757

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Seller: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, GermanyBuchWeltWeit Ludwig Meier e.K.

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This item is printed on demand - it takes 3-4 days longer - Neuware -Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications. 262 pp. Englisch.

Seller Inventory # 9789535111757

Title
Updates in Advanced Lithography
Author
Sumio Hosaka
Publisher
Intechopen Jul 2013
Publication year
2013
Condition
Neu
Binding
Buch
Language
English
ISBN 10
9535111752
ISBN 13
9789535111757
Item weight
782 grams
Dimensions
266x185x23 mm

BuchWeltWeit Ludwig Meier e.K.

Bergisch Gladbach, Germany

5-star seller

AbeBooks seller since January 11, 2012

Shipping rates from Germany to U.S.A.

Item5 to 15 business days5 to 15 business days
First itemUS$ 26.72US$ 26.72
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BuchWeltWeit Ludwig Meier e.K.

Germany