VOC Detection Using ZnO nanorod Arrays in Resistive-Capacitive sensor

The objectives of this book were i) to develop low temperature ZnO nanorods based volatile organic compound (VOCs) sensor with stable andr epeatable sensing performance to detect some alcohols and other VOCs(methanol, ethanol, acetone and 2-butanone), in the resistive/planar mode, ii) to improve the sensor performance viz. response magnitude, response time and recovery time by employing catalytic noble metal like Pd, either as con-tact electrodes or as a surface iii) to understand the sensing mechanism of such VOCs on nano-structured oxide surfaces like nanorods, iv) to study of effect of humidity on VOC sensing performance of the resistive device, v)to fabricate ZnO nanorod based MIS device structure and to carry out the capacitive mode (ac) measurement with the same target species. The aligned ZnO hexagonal nanorod array was synthesized by a low temperature deposition (CBD) technique using the sol-gel grown ZnO seed layer on SiO2 coated p-Si substrate and detailed structural, morphological and electrical characterizations of the grown nanorods were carried out.