Vacuum Methods in EM by W. Bigelow in series Practical Methods in Electron Microscopy: Vol 15 Ed by Audrey M. Glauert

This study provides full details and advice on the understanding and practical operation of the vacuum systems found in electron microscope laboratories. The importance of the correct functioning of these systems is too frequently underestimated, with the result that electron microscopes and other vacuum equipment, such as freeze-etching units and sputter coaters, give less than their optimum performance. It provides all the information necessary to help scientists, technicians and engineers operate and service vacuum systems correctly, both in electron microscope units and in other laboratories. Detailed and fully illustrated descriptions are given of basic vacuum processes, of the functioning of vacuum gauges and pumps, from simple rotary pumps to the latest bulk getter and cryogenic pumps, and of the correct operating procedures for different types of vacuum systems. The book finishes with a chapter describing the procedures for detecting and repairing leaks in vacuum systems.