Isbn: 9781510692534 - Extreme Ultraviolet Lithography (press Monographs) (11 results)

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  • Language: English

    Published by SPIE Press, 2026

    1510692533 / 9781510692534

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    Seller: PBShop.store UK, Fairford, GLOS, United KingdomPBShop.store UK

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    PAP. Condition: New. New Book. Shipped from UK. Established seller since 2000.

  • Language: English

    Published by SPIE Press, 2026

    1510692533 / 9781510692534

    • Softcover

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  • Language: English

    Published by SPIE Press, US, 2026

    1510692533 / 9781510692534

    • Softcover

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    Paperback. Condition: New. Second Edition. In this second edition of Extreme Ultraviolet Lithography, coverage is maintained on the fundamental aspects of EUV lithographic technology for topics such as exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Lithography costs, which have often influenced areas of technical focus, are also discussed. Many updates are included that reflect the significant advances in EUV lithography since the publication of the first edition. All topics are approached from the perspective of a practicing lithographer in a wafer fab, working in either manufacturing or development, and there are many references at the end of each chapter.

  • Language: English

    Published by John Wiley & Sons, 2026

    1510692533 / 9781510692534

    • Softcover

    Seller: Revaluation Books, Exeter, United KingdomRevaluation Books

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    Paperback. Condition: Brand New. 344 pages. 5.98x0.79x9.02 inches. In Stock.

  • Language: English

    Published by SPIE Press, 2026

    1510692533 / 9781510692534

    • Softcover

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  • Language: English

    Published by SPIE Press, 2026

    1510692533 / 9781510692534

    • Softcover

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    Condition: New. 2026. Second. paperback. . . . . .

  • Language: English

    Published by SPIE Press, 2026

    1510692533 / 9781510692534

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  • Language: English

    Published by SPIE Press, 2026

    1510692533 / 9781510692534

    • Softcover

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    Condition: New. 2026. Second. paperback. . . . . . Books ship from the US and Ireland.

  • Language: English

    Published by SPIE Press, 2026

    1510692533 / 9781510692534

    • Softcover

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  • Language: English

    Published by SPIE Press, 2026

    1510692533 / 9781510692534

    • Softcover

    Seller: GreatBookPricesUK, Woodford Green, United KingdomGreatBookPricesUK

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  • Language: English

    Published by SPIE Press, US, 2026

    1510692533 / 9781510692534

    • Softcover

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    Paperback. Condition: New. Second Edition. In this second edition of Extreme Ultraviolet Lithography, coverage is maintained on the fundamental aspects of EUV lithographic technology for topics such as exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Lithography costs, which have often influenced areas of technical focus, are also discussed. Many updates are included that reflect the significant advances in EUV lithography since the publication of the first edition. All topics are approached from the perspective of a practicing lithographer in a wafer fab, working in either manufacturing or development, and there are many references at the end of each chapter.