Advanced Gate Stack, Source/drain and Channel Engineering for Si-Based CMOS 5; New Materials, Processes and Equipment; Proceedings, and Equipment

V. Narayanan Et. Al

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ISBN 10: 1566777097 ISBN 13: 9781566777094
Published by Electrochemical Society, Pennington, NJ, 2009
Language: English
Condition: Used - Very good Hardcover

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