Fundamental Principles of Optical Lithography: The Science of Microfabrication
Language: English
Published by John Wiley & Sons Inc, 2007
- First Edition
- Softcover
- New
Seller: Kennys Bookshop and Art Galleries Ltd., Galway, GY, IrelandKennys Bookshop and Art Galleries Ltd.
AbeBooks seller since February 27, 2001
Condition: New
US$ 92.47
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Add to basketItem description from seller
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter. Num Pages: 534 pages, Illustrations. BIC Classification: TJFC. Category: (P) Professional & Vocational. Dimension: 243 x 169 x 31. Weight in Grams: 1002. . 2012. 1st Edition. Paperback. . . . .
Seller Inventory # V9780470727300
- Title
- Fundamental Principles of Optical Lithography: The Science of Microfabrication
- Author
- Chris Mack
- Publisher
- John Wiley & Sons Inc
- Publication year
- 2007
- Condition
- New
- Binding
- Soft cover
- Language
- English
- ISBN 10
- 0470727306
- ISBN 13
- 9780470727300
- Edition
- 1st Edition
By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.
This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.
Additional Information:
Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
"Synopsis" may belong to another edition of this title.
About the Author
Chris A. Mack, Vice-President of Lithography Technology, Lithoguru.com.
"About the title" may belong to another edition of this title.
Kennys Bookshop and Art Galleries Ltd.
Galway, GY, Ireland
AbeBooks seller since February 27, 2001
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