High k Gate Dielectrics (Materials Science and Engineering (Hardcover))

M.Houssa editor

ISBN 10: 0750309067 / ISBN 13: 9780750309066

Published by IOP Publishing Ltd, 2004

About this Item

Published by IOP Publishing Ltd in 2004, here is the first hardback printing of High K Gate Dielectrics (Materials Science and Engineering Series)edited by M.Houssa. Orange boards, 601 illustrated pages the book is in very good condition with some light fading to the spine. The book is very heavy and therefore additional postage MUST be applied to areas OUTSIDE the UK as follows: Europe £6, Rest of the World £9. UK postage is as quoted and will be tracked for this item.

Seller Inventory # 12675

Bibliographic Details

• Title: High k Gate Dielectrics (Materials Science and Engineering (Hardcover))
• Publisher: IOP Publishing Ltd
• Publication Date: 2004
• Language: English
• ISBN 10: 0750309067
• ISBN 13: 9780750309066
• Binding: Hardcover
• Edition: 1st Edition
• Condition: Very Good
• Dust Jacket Condition: No Jacket
• Weight: 1.5 kilograms

About this title

Synopsis

The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be required, making this is a subject of intensive research activity within the microelectronics community. High k Gate Dielectrics reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from leading researchers from Europe and the USA, the book first describes the various deposition techniques used for construction of layers at these dimensions. It then considers characterization techniques of the physical, chemical, structural, and electronic properties of these materials. The book also reviews the theoretical work done in the field and concludes with technological applications.

About the Author

Michel Houssa Laboratoire Materiaux et Microelectronique de Provence, Universite de Provence, France Silicon Processing and Device Technology Division, IMEC, Belgium