Surfaces, Interfaces, and Films for Microelectronics (Hardcover)

Eugene A. Irene

ISBN 10: 0470174471 / ISBN 13: 9780470174470

Published by John Wiley & Sons Inc, New York, 2008

About this Item

Hardcover. The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students. The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes Electronic and microelectronic materials are vital to technologies such as semiconductors, integrated circuits, magnetic alloys, insulators, and optical/display materials. Shipping may be from our UK warehouse or from our Australian or US warehouses, depending on stock availability.

Seller Inventory # 9780470174470

Bibliographic Details

• Title: Surfaces, Interfaces, and Films for Microelectronics (Hardcover)
• Publisher: John Wiley & Sons Inc, New York
• Publication Date: 2008
• Language: English
• ISBN 10: 0470174471
• ISBN 13: 9780470174470
• Binding: Hardcover
• Edition: 1st Edition
• Condition: new

About this title

Synopsis

The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.

About the Author

Eugene A. Irene, PhD, is Professor of Chemistry at the University of North Carolina, Chapel Hill.?Prior to that appointment, he worked in the Thomas J. Watson Research Center at IBM for ten years. Professor Irene has written more than 250 journal publications and is the author of various books, including Electronic Materials Science (Wiley). He is coeditor of Handbook of Ellipsometry and numerous scientific reviews and book chapters.