Items related to Semiconductor Lithography: Principles, Practices, and...

Semiconductor Lithography: Principles, Practices, and Materials (Microdevices) - Hardcover

Wayne M. Moreau

 
9780306421853: Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)
Hardcover
ISBN 10: 0306421852 ISBN 13: 9780306421853
Publisher: Springer, 1987

This specific ISBN edition is currently not available.

Synopsis

This volume brings together the work of many scientists and engineers over the last ten years and focuses on the basic resist materials, the lithographic processes, and the fundamental principles behind each lithographic process.

"synopsis" may belong to another edition of this title.

  • PublisherSpringer
  • Publication date1987
  • ISBN 10 0306421852
  • ISBN 13 9780306421853
  • BindingHardcover
  • LanguageEnglish
  • Edition number1
  • Number of pages952

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Other Popular Editions of the Same Title

9781461282280: Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)

Featured Edition

ISBN 10:  1461282284 ISBN 13:  9781461282280
Publisher: Springer, 2012
Softcover