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Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies (NATO Science Series E:, 264) - Hardcover
Synopsis
Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography.
Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).
"synopsis" may belong to another edition of this title.
- PublisherSpringer
- Publication date1994
- ISBN 10 0792327942
- ISBN 13 9780792327943
- BindingHardcover
- LanguageEnglish
- Number of pages228
- EditorGentili M., Giovannella Carlo, Selci Stefano
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Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies (Nato Science Series E:)
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Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies (NATO Science Series E:, 264)
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Gebunden. Condition: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Proceedings of the NATO Advanced Research Workshop, Frascati, Roma, Italy, April 6--8, 1993 Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena. Seller Inventory # 5967079
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Nanolithography : A Borderland between STM, EB, IB, and X-Ray Lithographies
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Springer Netherlands, Springer Netherlands, 1994
ISBN 10: 0792327942
ISBN 13: 9780792327943
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Buch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL). Seller Inventory # 9780792327943
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Nanolithography
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Springer Netherlands Apr 1994, 1994
ISBN 10: 0792327942
ISBN 13: 9780792327943
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Buch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL). 232 pp. Englisch. Seller Inventory # 9780792327943
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