This book-the first of its kind-presents general methods for feedback controller synthesis and optimization of multiscale systems, illustrating their application to thin-film growth, sputtering processes, and catalytic systems of industrial interest. The authors demonstrate the advantages of the methods presented for control and optimization through extensive simulations.
Included in the work are new techniques for feedback controller design and optimization of multiscale process systems that are not included in...
Interest in the control and optimization of multiscale process systems has been triggered by the need to achieve tight feedback control and optimal operation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly coupled macroscopic and microscopic phenomena. Drawing from recent advances in the dynamics and control of distributed parameter processes for which continuum laws are...
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Buch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -This book-the first of its kind-presents general methods for feedback controller synthesis and optimization of multiscale systems, illustrating their application to thin-film growth, sputtering processes, and catalytic systems of industrial interest. The authors demonstrate the advantages of the methods presented for control and optimization through extensive simulations.Included in the work are new techniques for feedback controller design and optimization of multiscale process systems that are not included in other books. The book also contains a rich collection of new research topics and references to significant recent work. 256 pp. Englisch. Seller Inventory # 9780817647926
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