Doping Engineering for Front-End Processing: Volume 1070 (MRS Proceedings) - Softcover

 
9781107408548: Doping Engineering for Front-End Processing: Volume 1070 (MRS Proceedings)
Softcover
ISBN 10: 1107408547 ISBN 13: 9781107408548
Publisher: Cambridge University Press, 2014

Synopsis

Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

"synopsis" may belong to another edition of this title.

Book Description

The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

"About this title" may belong to another edition of this title.

Publisher
Cambridge University Press
Publication date
2014
Language
English
ISBN 10 
1107408547
ISBN 13 
9781107408548
Binding
Paperback
Edition number
1
Number of pages
336
Editor
Pawlak B. J., Pelaz M. L., Law M., Surugo K.