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The Physics of Micro/Nano-Fabrication (Microdevices) - Softcover

 
9781441932211: The Physics of Micro/Nano-Fabrication (Microdevices)
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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

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  • PublisherSpringer
  • Publication date2010
  • ISBN 10 1441932216
  • ISBN 13 9781441932211
  • BindingPaperback
  • Number of pages642

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9780306441462: The Physics of Micro/Nano-Fabrication (Microdevices)

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ISBN 10:  0306441462 ISBN 13:  9780306441462
Publisher: Springer, 1993
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  • 9788184894134: The Physics of Micro/Nano-Fabrication

    SPRING..., 2010
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