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MEMS: A Practical Guide of Design, Analysis, and Applications - Hardcover

Korvink, Jan; Paul, Oliver

 
9783540211174: MEMS: A Practical Guide of Design, Analysis, and Applications

Synopsis

A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.

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About the Author

Jan G. Korvink holds the Chair for Microsystem Technology, specializing in MEMS modeling and low cost MEMS fabrication, at IMTEK–The Institute for Microsystem Technology – University of Freiburg, Germany. Dr. Korvink has authored and co-authored more than 120 technical publications including 6 book chapters in the MEMS area and one book. He was a founder of the Swiss company NM Numerical Modeling. He serves on the technical program committees of the following international conferences: Nanotech, DTIP, ESSDERC, EUROSIME, Eurosensors.

Review

"The editors have done an excellent job in providing a handbook that will help companies maintain their competitive advantage now and into the future. û Wolfgang Menz, The Albert Ludwig University

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