Scanning Electron Microscopy: Physics of Image Formation and Microanalysis - Hardcover

Rudolf Reichelt; Ludwig Reimer

Hardcover

ISBN 10: 3540853170 ISBN 13: 9783540853176

Publisher: Springer, 2020

Synopsis

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Edition details

• Publisher: Springer
• Publication date: 2020
• Language: English
• ISBN 10: 3540853170
• ISBN 13: 9783540853176
• Binding: Hardcover
• Edition number: 3
• Number of pages: 511