Synopsis
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
"synopsis" may belong to another edition of this title.
From the Back Cover
This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.
"About this title" may belong to another edition of this title.
Other Popular Editions of the Same Title
Search results for Modelling of Microfabrication Systems (Microtechnology...
Stock Image
Modelling of Microfabrication Systems (eng)
Print on DemandSeller: Brook Bookstore On Demand, Napoli, NA, Italy
Seller rating 3 out of 5 stars
Condition: new. Questo è un articolo print on demand. Seller Inventory # H3F4LAZVWM
Buy New
US$ 148.00
US$ 6.26 shipping
Ships from Italy to U.S.A.
Ships from Italy to U.S.A.
Quantity: Over 20 available
Stock Image
Modelling of Microfabrication Systems (Microtechnology and MEMS)
Seller: Ria Christie Collections, Uxbridge, United Kingdom
Seller rating 5 out of 5 stars
Condition: New. In. Seller Inventory # ria9783642055362_new
Buy New
US$ 187.41
US$ 15.81 shipping
Ships from United Kingdom to U.S.A.
Ships from United Kingdom to U.S.A.
Quantity: Over 20 available
Seller Image
Modelling of Microfabrication Systems
Published by
Springer Berlin Heidelberg Dez 2010, 2010
ISBN 10: 3642055362
ISBN 13: 9783642055362
New
Taschenbuch
Seller: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography. 280 pp. Englisch. Seller Inventory # 9783642055362
Buy New
US$ 188.11
US$ 26.17 shipping
Ships from Germany to U.S.A.
Ships from Germany to U.S.A.
Quantity: 2 available
Seller Image
Modelling of Microfabrication Systems
Seller: preigu, Osnabrück, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. Modelling of Microfabrication Systems | Raja Nassar (u. a.) | Taschenbuch | x | Englisch | 2010 | Springer | EAN 9783642055362 | Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu. Seller Inventory # 107117125
Buy New
US$ 164.10
US$ 79.66 shipping
Ships from Germany to U.S.A.
Ships from Germany to U.S.A.
Quantity: 5 available
Seller Image
Modelling of Microfabrication Systems
Published by
Springer, Springer Spektrum Dez 2010, 2010
ISBN 10: 3642055362
ISBN 13: 9783642055362
New
Taschenbuch
Seller: buchversandmimpf2000, Emtmannsberg, BAYE, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. This item is printed on demand - Print on Demand Titel. Neuware -1 Ion Beam.- 2 X-ray Lithography.- 3 Laser Chemical Vapor Deposition.- 4 Laser Photopolymerization.- 5 Laser Ablation.- 6 Thin Films.- References.Springer-Verlag KG, Sachsenplatz 4-6, 1201 Wien 280 pp. Englisch. Seller Inventory # 9783642055362
Buy New
US$ 188.11
US$ 68.28 shipping
Ships from Germany to U.S.A.
Ships from Germany to U.S.A.
Quantity: 1 available
Seller Image
Modelling of Microfabrication Systems
Seller: AHA-BUCH GmbH, Einbeck, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications. Seller Inventory # 9783642055362
Buy New
US$ 195.90
US$ 70.73 shipping
Ships from Germany to U.S.A.
Ships from Germany to U.S.A.
Quantity: 1 available
Stock Image
Modeling of Microfabrication Systems (Microtechnology and MEMS)
Published by
Springer Berlin Heidelberg, 2003
ISBN 10: 3642055362
ISBN 13: 9783642055362
New
Paperback
Seller: Revaluation Books, Exeter, United Kingdom
Seller rating 5 out of 5 stars
Paperback. Condition: Brand New. 269 pages. 9.00x6.25x0.64 inches. In Stock. Seller Inventory # x-3642055362
Buy New
US$ 270.10
US$ 13.20 shipping
Ships from United Kingdom to U.S.A.
Ships from United Kingdom to U.S.A.
Quantity: 2 available
Stock Image
Modelling of Microfabrication Systems (Microtechnology and MEMS)
Seller: Mispah books, Redhill, SURRE, United Kingdom
Seller rating 4 out of 5 stars
Paperback. Condition: Like New. Like New. book. Seller Inventory # ERICA77336420553626
Buy Used
US$ 259.68
US$ 33.00 shipping
Ships from United Kingdom to U.S.A.
Ships from United Kingdom to U.S.A.
Quantity: 1 available