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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications - Softcover

 
9783662311035: Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
Softcover
ISBN 10: 3662311038 ISBN 13: 9783662311035
Publisher: Springer, 2014

This specific ISBN edition is currently not available.

Synopsis

Angular, energy, and mass distribution of sputtered particles.- Charged and excited states of sputtered atoms.- Surface and depth analysis based on sputtering.- Desorption of organic molecules from solid and liquid surfaces induced by particle impact.- Production of microstructures by ion beam sputtering.- Production of thin films by controlled deposition of sputtered material.

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Publisher
Springer
Publication date
2014
Language
English
ISBN 10 
3662311038
ISBN 13 
9783662311035
Binding
Paperback
Number of pages
436
Editor
Behrisch Rainer, Wittmaack Klaus

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Other Popular Editions of the Same Title

9783662311042: Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)

Featured Edition

ISBN 10:  3662311046 ISBN 13:  9783662311042
Publisher: Springer, 2014
Softcover