Items related to Micro and Nano Fabrication: Tools and Processes

Micro and Nano Fabrication: Tools and Processes - Softcover

Gatzen, Hans H.; Saile, Volker; Leuthold, Jürg

 
9783662443965: Micro and Nano Fabrication: Tools and Processes
Softcover
ISBN 10: 3662443961 ISBN 13: 9783662443965
Publisher: Springer, 2015

This specific ISBN edition is currently not available.

Synopsis

Introduction-MEMS, a Historical Perspective.- Vacuum Technology.- Deposition Technologies.- Etching Technologies.- Doping and Surface Modification.- Lithography.- LIGA.- Nanofabrication by Self-Assembly.- Enabling Technologies I - Wafer Planarization and Bonding.- Enabling Technologies II - Contamination Control.- Device Fabrication - An Example.

"synopsis" may belong to another edition of this title.

Publisher
Springer
Publication date
2015
Language
English
ISBN 10 
3662443961
ISBN 13 
9783662443965
Binding
Paperback
Number of pages
548