Micro and Nano Fabrication: Tools and Processes - Softcover

Gatzen, Hans H.; Saile, Volker; Leuthold, Jürg

 
9783662443965: Micro and Nano Fabrication: Tools and Processes
Softcover
ISBN 10: 3662443961 ISBN 13: 9783662443965
Publisher: Springer, 2015

Synopsis

Introduction-MEMS, a Historical Perspective.- Vacuum Technology.- Deposition Technologies.- Etching Technologies.- Doping and Surface Modification.- Lithography.- LIGA.- Nanofabrication by Self-Assembly.- Enabling Technologies I - Wafer Planarization and Bonding.- Enabling Technologies II - Contamination Control.- Device Fabrication - An Example.

"synopsis" may belong to another edition of this title.

Publisher
Springer
Publication date
2015
Language
English
ISBN 10 
3662443961
ISBN 13 
9783662443965
Binding
Paperback
Number of pages
548

Other Popular Editions of the Same Title

9783662443941: Micro and Nano Fabrication

Featured Edition

ISBN 10:  3662443945 ISBN 13:  9783662443941
Publisher: Springer, 2015
Hardcover