Applications of Plasma Processes to Vlsi Technology
Language: English
Published by John Wiley & Sons, 1985
- Hardcover
- Used
Seller: Bookmans, tucson, AZ, U.S.A.Bookmans
AbeBooks seller since April 30, 2007
Condition: Used - Fair
US$ 12.90
Quantity: 1 available
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- Title
- Applications of Plasma Processes to Vlsi Technology
- Author
- Takuo Sugano
- Publisher
- John Wiley & Sons
- Publication year
- 1985
- Condition
- Acceptable
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0471869600
- ISBN 13
- 9780471869603
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