Cmos Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications

Rachmady Willy Butterbaugh Jeffery W. Harris H. Rusty Taylor Bill Demkov Alexander A.

ISBN 10: 1605111287 / ISBN 13: 9781605111285

Published by Materials Research Society, 2009

About this Item

PRINT ON DEMAND pp. viii + 179.

Seller Inventory # 181284821

Bibliographic Details

• Title: Cmos Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications
• Publisher: Materials Research Society
• Publication Date: 2009
• Language: English
• ISBN 10: 1605111287
• ISBN 13: 9781605111285
• Binding: Hardcover
• Condition: New

About this title

Synopsis

To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.