Title: Computational Modeling in Semiconductor Processing (Artech House Materials Science Library)
Publisher: Artech House Publishers
Publication Date: 1994
Language: English
ISBN 10: 0890067074
ISBN 13: 9780890067079
Binding: Hardcover
Condition: New

About this title

Synopsis

This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes.

"About this title" may belong to another edition of this title.

Store Description

Visit Seller's Storefront

Seller's business information

SHIMEDIA
NY, U.S.A.

Sale & Shipping Terms

Terms of Sale

Shipping Terms

Shipping rates within U.S.A.

Shipping rates within U.S.A.
Order quantity	5 to 14 business days	5 to 14 business days
First item	US$ 0.00	US$ 14.00

Delivery times are set by sellers and vary by carrier and location. Orders passing through Customs may face delays and buyers are responsible for any associated duties or fees. Sellers may contact you regarding additional charges to cover any increased costs to ship your items.