Title: Electrical characterization of transition metals in silicon: a study on titanium, cobalt, and nickel and their interaction with hydrogen
Publisher: Cuvillier
Publication Date: 2015
Language: English
ISBN 10: 3954049880
ISBN 13: 9783954049882
Binding: Soft cover
Condition: New
Weight: 279 grams

About this title

Synopsis

Silizium ist ein wichtiger Rohstoff unserer modernen Welt. Mikroelektronik, Sensorik und Photovoltaik sind drei wichtige Anwendungsgebiete, die aus unserem t�glichen Leben heute nicht mehr wegzudenken sind. Entscheidend f�r all diese Anwendungen ist das Verst�ndnis der elektrischen Eigenschaften des Materials, welche durch Defekte und Verunreinigungen beeinflusst werden. Die �bergangsmetalle sind eine wichtige Klasse von Verunreinigungen im Silizium, da sie die elektrischen Eigenschaften stark beeinflussen. Auch ist bekannt, dass Wasserstoff, welcher in vielen Prozessen in Silizium eindringen kann, mit vielen Defekten reagiert. In der vorliegenden Dissertation wird die Wechselwirkung von Wasserstoff mit den Metallen Titan, Kobalt und Nickel mit Hilfe der kapazitiven Messmethoden DLTS und MCTS untersucht. Verschiedene elektrisch aktive Metall-Wasserstoff-Komplexe k�nnen nachgewiesen werden. Auch eine Passivierung der Metalle durch Wasserstoff wird beobachtet. Neben den Reaktionen mit den Metallen wird auch eine Wechselwirkung des Wasserstoffs mit im Silizium vorhandenem Kohlenstoff untersucht. F�r eine Einordnung der Ergebnisse werden diese mit dem aus der Literatur bekannten Verhalten benachbarter Elemente verglichen.

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