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Bibliographic Details

Title: Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
Publisher: CRC Press
Publication Date: 2002
Language: English
ISBN 10: 0849308267
ISBN 13: 9780849308260
Binding: Hardcover
Edition: 2nd Edition
Condition: good

About this title

Synopsis

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition

Revised chapters that reflect the many recent advances in the field

Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology

In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.

Many more links to the Web

Problem sets in each chapter

About the Author

University of California, Irvine, USA

"About this title" may belong to another edition of this title.

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Goodwill of Silicon Valley?s mission is to support our employees, our customers, and people with challenging barriers to employment; to raise their standard of living and improve their lives through our services and social enterprise. Founded in Santa Clara County in 1928, Goodwill of Silicon Valley is dedicated to improving employment opportunities, increasing standards of living, providing economic independence, and restoring our clients? sense of self-worth. We do this through workforce creation, vocational training, and environmental stewardship. With 18 retail stores, an online store, an extensive reuse/recycling operation, and our Contract Services division, we help people overcome barriers to employment, build sustainable livelihoods, and transform their lives and communities.

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