Title: Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication (Spie Press Monograph, Pm39-Pm40)
Publisher: SPIE--The International Society for Optical Engineering
Publication Date: 1997
Language: English
ISBN 10: 0819423793
ISBN 13: 9780819423795
Binding: paperback
Weight: 51 ounces

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Synopsis

Copublished with IEE. This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications.

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