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Bibliographic Details

Title: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)
Publisher: William Andrew (edition 1)
Publication Date: 1991
Language: English
ISBN 10: 0815512201
ISBN 13: 9780815512202
Binding: Hardcover
Edition: 1.
Condition: Very Good

About this title

Synopsis

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Review

"The text provides and excellent reference for plasma processing." - SAMPE Journal

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AZ Texts LLC
228 Park Ave S Suite 38827, New York, NY, 10003, U.S.A.

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