Image Formation in Low-Voltage Scanning Electron Microscopy (Tutorial Texts in Optical Engineering)

Reimer, Ludwig/ O'Shea, Donald C. (Editor)

ISBN 10: 0819412066 / ISBN 13: 9780819412065

Published by Society of Photo Optical, 1993

About this Item

117 pages. 10.00x7.00x0.50 inches. In Stock.

Seller Inventory # __0819412066

Bibliographic Details

• Title: Image Formation in Low-Voltage Scanning Electron Microscopy (Tutorial Texts in Optical Engineering)
• Publisher: Society of Photo Optical
• Publication Date: 1993
• Language: English
• ISBN 10: 0819412066
• ISBN 13: 9780819412065
• Binding: Paperback
• Condition: Brand New
• Weight: 0.3 kilograms

About this title

Synopsis

While most textbooks about scanning electron microscopy (SEM) cover the high-voltage range from 5-50 keV, this volume considers the special problems in low-voltage SEM and summarizes the differences between LVSEM and conventional SEM. Chapters cover the influence of lens aberrations and design on electron-probe formation; the effect of elastic and inelastic scattering processes on electron diffusion and electron range; charging and radiation damage effects; the dependence of SE yield and the backscattering coefficient on electron energy, surface tilt, and material as well as the angular and energy distributions; and types of image contrast and the differences between LVSEM and conventional SEM modes due to the influence of electron-specimen interactions. <P> Contents: <BR>- Introduction <BR>- Electron Optics and Instrumentation <BR>- Electron Scattering and Diffusion <BR>- Backscattered and Secondary-Electron Emission <BR>- Specimen Charging and Damage <BR>- Signal Formation and Linage Contrast <BR>- Electron Spectroscopic Methods