Series: Tutorial Texts. Num Pages: 143 pages, illustrations. BIC Classification: PDND; PHK. Category: (G) General (US: Trade); (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly; (UU) Undergraduate. Dimension: 254 x 178. Weight in Grams: 295. . 1993. Paperback. . . . .

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Bibliographic Details

Title: Image Formation in Low-Voltage Scanning Electron Microscopy (SPIE Tutorial Text Vol. TT12) (Tutorial Texts in Optical Engineering)
Publisher: SPIE Press
Publication Date: 1993
Language: English
ISBN 10: 0819412066
ISBN 13: 9780819412065
Binding: Soft cover
Condition: New

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Synopsis

While most textbooks about scanning electron microscopy (SEM) cover the high-voltage range from 5-50 keV, this volume considers the special problems in low-voltage SEM and summarizes the differences between LVSEM and conventional SEM. Chapters cover the influence of lens aberrations and design on electron-probe formation; the effect of elastic and inelastic scattering processes on electron diffusion and electron range; charging and radiation damage effects; the dependence of SE yield and the backscattering coefficient on electron energy, surface tilt, and material as well as the angular and energy distributions; and types of image contrast and the differences between LVSEM and conventional SEM modes due to the influence of electron-specimen interactions. Contents: - Introduction - Electron Optics and Instrumentation - Electron Scattering and Diffusion - Backscattered and Secondary-Electron Emission - Specimen Charging and Damage - Signal Formation and Linage Contrast - Electron Spectroscopic Methods

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