Title: Integrated Processing for Micro- And Optoelectronics: Proceedings of Symposium d on Integrated Processing for Micro- And Optoelectronics of the 1993 . Research Society Symposia Proceedings)
Publisher: North-Holland
Publication Date: 1994
Language: English
ISBN 10: 0444819835
ISBN 13: 9780444819833
Binding: Hardcover
Condition: New

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Synopsis

These proceedings focus on the technology application driving forces for multichamber approaches to semiconductor process sequences, otherwise called cluster tools or integrated processing and present research results upon which these manufacturing technologies are built.

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