Integrated Processing for Micro- And Optoelectronics: Proceedings of Symposium d on Integrated Processing for Micro- And Optoelectronics of the 1993 . Research Society Symposia Proceedings)
Language: English
Published by North-Holland, 1994
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- New
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- Title
- Integrated Processing for Micro- And Optoelectronics: Proceedings of Symposium d on Integrated Processing for Micro- And Optoelectronics of the 1993 . Research Society Symposia Proceedings)
- Author
- Symposium D On Beam Processing And Laser Chemistry; Katz, Avishay; Nissim, Yves I.
- Publisher
- North-Holland
- Publication year
- 1994
- Condition
- New
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0444819835
- ISBN 13
- 9780444819833
These proceedings focus on the technology application driving forces for multichamber approaches to semiconductor process sequences, otherwise called cluster tools or integrated processing and present research results upon which these manufacturing technologies are built.
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