Title: Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)
Publisher: American Chemical Society,
Publication Date: 1983
Language: English
ISBN 10: 0841207755
ISBN 13: 9780841207752
Binding: Hardcover
Condition: New

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Synopsis

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

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