Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)

Thompson, L. F. , Ed.

ISBN 10: 0841207755 / ISBN 13: 9780841207752

Published by American Chemical Society,, 1983

About this Item

A copy that has been read, remains in good condition. All pages are intact, and the cover is intact. The spine and cover show signs of wear. Pages can include notes and highlighting and show signs of wear, and the copy can include "From the library of" labels or previous owner inscriptions. 100% GUARANTEE! Shipped with delivery confirmation, if you're not satisfied with purchase please return item for full refund. Ships via media mail.

Seller Inventory # OTV.0841207755.G

Bibliographic Details

• Title: Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)
• Publisher: American Chemical Society,
• Publication Date: 1983
• Language: English
• ISBN 10: 0841207755
• ISBN 13: 9780841207752
• Binding: Hardcover
• Condition: good

About this title

Synopsis

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.