Introduction to Microlithography: Theory, Materials, and Processing: Based on a Workshop Sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, WA, March 20-25, 1983

Thompson, L.F.; C.G. Wilson, M.J. Bowden, editors

ISBN 10: 0841207755 / ISBN 13: 9780841207752

Published by American Chemical Society Washington, DC 1983, 1983

About this Item

363pp. 8vo Illustrated in black and white Terra cotta cloth Contributions by the editors and J.A. Mucha, D.W. Hess, and B.J. Linn. ACS Symposium Series 219 A few highlighted passages and notes else VG/no dj 0-8412-0775-5.

Seller Inventory # 13824071503

Bibliographic Details

• Title: Introduction to Microlithography: Theory, Materials, and Processing: Based on a Workshop Sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, WA, March 20-25, 1983
• Publisher: American Chemical Society Washington, DC 1983
• Publication Date: 1983
• Language: English
• ISBN 10: 0841207755
• ISBN 13: 9780841207752
• Binding: Hardcover

About this title

Synopsis

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.