Introduction to Microlithography: Theory, Materials, and Processing

Language: English

Published by American Chemical Society, 1983

0841207755 / 9780841207752

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Seller: BookDepart, Shepherdstown, WV, U.S.A.BookDepart

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Hardcover

Condition: Used - Good

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Hardcover; ACS Symposium Series 219; based on a workshop sponsored by the A CS Division of Organic Coatings and Plastics Chemistry at the 185th meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983; light fading, light shelf wear to exterior; former owner's stamping on fron t end page and lower page edges; otherwise in very good condition with cle an text and tight binding. Dust jacket shows fading, edge wear, and a few s mall tears.

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Title
Introduction to Microlithography: Theory, Materials, and Processing
Author
Thompson, L.F., C.G. Willson, And M.J. Bowden, Editors
Publisher
American Chemical Society
Publication year
1983
Condition
UsedGood
Binding
Hardcover
Language
English
ISBN 10
0841207755
ISBN 13
9780841207752

BookDepart

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5-star seller

AbeBooks seller since April 18, 1998

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