Introduction to Microlithography: Theory, Materials, and Processing

Thompson, L.F., C.G. Willson, and M.J. Bowden, editors

ISBN 10: 0841207755 / ISBN 13: 9780841207752

Published by American Chemical Society, 1983

About this Item

Hardcover; ACS Symposium Series 219; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983; light fading, light shelf wear to exterior; former owner's stamping on front end page and lower page edges; otherwise in very good condition with clean text and tight binding. Dust jacket shows fading, edge wear, and a few small tears.

Seller Inventory # 74736

Bibliographic Details

• Title: Introduction to Microlithography: Theory, Materials, and Processing
• Publisher: American Chemical Society
• Publication Date: 1983
• Language: English
• ISBN 10: 0841207755
• ISBN 13: 9780841207752
• Binding: Hardcover
• Condition: UsedGood
• Dust Jacket Condition: Dust Jacket Included

About this title

Synopsis

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.