527pp.incl.index; HB blue w/white; some rub w/wear on edges; PONft.pastedwn.; clean,tight pgs. " . the physics of the lithographic process, organic resist materials, resist processing, and plasma etching." illus.

Seller Inventory # 024349

Contact seller

Report this item

Bibliographic Details

Title

Introduction to Microlithography

Publisher

American Chemical Society, Washington, DC

Publication Date

1994

Language

English

ISBN 10

0841228485

ISBN 13

9780841228481

Binding

Hardcover

Edition

2nd

Condition

Very Good

Dust Jacket Condition

No Jacket

Seller catalogs

Stan

About this title

Synopsis

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

"About this title" may belong to another edition of this title.

Store Description

3,000 sq ft 35,000 + books mostly out of print, rare, many foreign language. especially strong in NATIVE AMERICA, WESTERN AMERICANA,SCIENCE, TECHNICAL,ART. Been here 30+. No international orders please too many scammers (Australians) and constantly changing rules and people in Germany complaining and adding weird new hoops (Extended Producer Responsibility) to jump through. Every country wants it's own tax form and tax ID and and VAT Number and IOSS ID or countless other acronyms that change weeksly and it's not worth it for us sorry.

Visit Seller's Storefront

Seller's business information

Xochi's Bookstore & Gallery
NM, U.S.A.

Sale & Shipping Terms

Terms of Sale

Form of Payment: Visa, Mastercard, Discover, Money Orders, Checks

Shipping Terms

Shipping costs are based on books weighing 2.2 LB, or 1 KG. If your book order is heavy or oversized, we may contact you to let you know extra shipping is required.

Shipping rates within U.S.A.

Shipping rates within U.S.A.
Order quantity	5 to 14 business days	3 to 6 business days
First item	US$ 5.00	US$ 11.00

Delivery times are set by sellers and vary by carrier and location. Orders passing through Customs may face delays and buyers are responsible for any associated duties or fees. Sellers may contact you regarding additional charges to cover any increased costs to ship your items.