An Introduction to Microlithography by C Willson ACS Symposium 1983 HCDJ
Language: English
Published by American Chemical Society,, 1983
- Hardcover
- Used
Seller: Crown City Books, Cortland, NY, U.S.A.Crown City Books
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- Title
- An Introduction to Microlithography by C Willson ACS Symposium 1983 HCDJ
- Author
- Thompson, L. F. , Ed.
- Publisher
- American Chemical Society,
- Publication year
- 1983
- Condition
- Good
- Binding
- hardcover
- Language
- English
- ISBN 10
- 0841207755
- ISBN 13
- 9780841207752
- Item weight
- 22 ounces
- Dimensions
- 0x0x0
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
"Synopsis" may belong to another edition of this title.
Crown City Books
Cortland, NY, U.S.A.
2-star seller
AbeBooks seller since April 25, 2026
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