Ion-Solid Interactions for Materials Modification and Processing: Volume 396 (MRS Proceedings)

David B. Poker, Dayush Ila, Yang-Tse Cheng, Lloyd R. Harriot

ISBN 10: 1558992995 / ISBN 13: 9781558992993

Published by Materials Research Society, 1996

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Bibliographic Details

• Title: Ion-Solid Interactions for Materials Modification and Processing: Volume 396 (MRS Proceedings)
• Publisher: Materials Research Society
• Publication Date: 1996
• Language: English
• ISBN 10: 1558992995
• ISBN 13: 9781558992993
• Binding: Hardcover
• Condition: Good
• Book Type: book

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Synopsis

Several beam-solid interaction techniques have been developed that can either stand alone or be used in connection with others for materials processing, for fabrication of devices with enhanced electro-optical and mechanical properties, and with enhanced resistance to corrosion and erosion. For example, advances in focused ion beams (FIB) have brought out-of-reach ideas and applications to fruition. This book from MRS focuses on the developments in ion-beam-assisted processing of materials and reviews successful applications of the techniques. Topics include: fundamentals of ion-solid interactions; ion-beam mixing; radiation damage; insulators and wide bandgap materials; polymers; optical materials; plasma and ion-assisted techniques; metals and tribology; focused ion beams; fundamental semiconductor processing and compound semiconductors.