Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology)

Sugawara, M.

ISBN 10: 019856287X ISBN 13: 9780198562870

Published by Oxford University Press, 1998

Language: English

Condition: New Hardcover

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Bibliographic Details

Title

Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology)

Publisher

Oxford University Press

Publication Date

1998

Language

English

ISBN 10

019856287X

ISBN 13

9780198562870

Binding

Hardcover

Condition

New

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About this title

Synopsis

This book focuses on the remarkable recent advances in understanding low pressure radio frequency glow discharges. It explains the basic analytical theory, plasma physics, and plasma diagnostics, before proceeding to the details of the etching process.

About the Author

Professor Minoru Sugawara, Hachinohe Institute of Technology, Hachinohe-city, Aomori 031, Japan. Fax: (0) 178 25 1430

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