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Bibliographic Details

Title: Rapid Thermal and Integrated Processing IV: Volume 470 (MRS Proceedings)
Publisher: Materials Research Society
Publication Date: 1998
Language: English
ISBN 10: 1558993746
ISBN 13: 9781558993747
Binding: Hardcover
Condition: acceptable

About this title

Synopsis

The MRS proceedings series on rapid thermal processing (RTP) has become the predominant international forum for research in this exciting and fast-growing field. In particular, this book in the series clearly indicates that the science of RTP is increasingly better understood and that equipment simulation and engineering have matured. With the so-called 'second generation' equipment vendors are providing useful and production-worthy solutions to the most pertinent problems within RTP - temperature measurement and reproducability. For that reason, the issues of temperature calibration and metrology, along with the International Temperature Scale, are featured. The evaluation and modelling of furnace, mini-bath and single-wafer RTP furnaces as the thermal method of choice are also addressed. Interesting developments are reported in the processing of dielectrics. Applications outside the field of silicon semiconductors are also presented. Topics include: measurement; RTCVD; modelling and manufacturing; integrated processing; silicides; annealing and defects; dielectrics; and RTP of III-V materials and other novel applications.

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Goodwill of Silicon Valley?s mission is to support our employees, our customers, and people with challenging barriers to employment; to raise their standard of living and improve their lives through our services and social enterprise. Founded in Santa Clara County in 1928, Goodwill of Silicon Valley is dedicated to improving employment opportunities, increasing standards of living, providing economic independence, and restoring our clients? sense of self-worth. We do this through workforce creation, vocational training, and environmental stewardship. With 18 retail stores, an online store, an extensive reuse/recycling operation, and our Contract Services division, we help people overcome barriers to employment, build sustainable livelihoods, and transform their lives and communities.

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