Scanning Electron Microscopy and X-Ray Microanalysis

Goldstein, Joseph I. (EDT); Newbury, Dale E.; Kchlin, Patrick; Joy, David C.; Lyman, Charles E.; Lifshin, Eric; Sawyer, Linda; Michael, Joseph R.

ISBN 10: 0306472929 / ISBN 13: 9780306472923

Published by Springer, 2003

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Bibliographic Details

• Title: Scanning Electron Microscopy and X-Ray Microanalysis
• Publisher: Springer
• Publication Date: 2003
• Language: English
• ISBN 10: 0306472929
• ISBN 13: 9780306472923
• Binding: Hardcover
• Edition: 3rd Edition
• Condition: good

About this title

Synopsis

In the decade since the publication of the second edition of Scanning Electron Microscopy and X-Ray Microanalysis, there has been a great expansion in the capabilities of the basic scanning electron microscope (SEM) and the x-ray spectrometers. The emergence of the variab- pressure/environmental SEM has enabled the observation of samples c- taining water or other liquids or vapor and has allowed for an entirely new class of dynamic experiments, that of direct observation of che- cal reactions in situ. Critical advances in electron detector technology and computer-aided analysis have enabled structural (crystallographic) analysis of specimens at the micrometer scale through electron backscatter diffr- tion (EBSD). Low-voltage operation below 5 kV has improved x-ray spatial resolution by more than an order of magnitude and provided an effective route to minimizing sample charging. High-resolution imaging has cont- ued to develop with a more thorough understanding of how secondary el- trons are generated. The ?eld emission gun SEM, with its high brightness, advanced electron optics, which minimizes lens aberrations to yield an - fective nanometer-scale beam, and “through-the-lens” detector to enhance the measurement of primary-beam-excited secondary electrons, has made high-resolution imaging the rule rather than the exception. Methods of x-ray analysis have evolved allowing for better measurement of specimens with complex morphology: multiple thin layers of different compositions, and rough specimens and particles. Digital mapping has transformed classic x-ray area scanning, a purely qualitative technique, into fully quantitative compositional mapping.

About the Author

This text is written by a team of authors associated with SEM and X-ray Microanalysis Courses presented as part of the Lehigh University Microscopy Summer School. Several of the authors have participated in this activity for more than 30 years.