Silicon Semiconductor Technology : Processing and Integration of Microelectronic Devices

Language: English

Published by Springer Vieweg, 2023

365841040X / 9783658410407

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Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH

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Softcover

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Druck auf Anfrage Neuware - Printed after ordering - The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching,doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includesmodern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer's view.

Seller Inventory # 9783658410407

Title
Silicon Semiconductor Technology : Processing and Integration of Microelectronic Devices
Author
Ulrich Hilleringmann
Publisher
Springer Vieweg
Publication year
2023
Condition
Neu
Binding
Taschenbuch
Language
English
ISBN 10
365841040X
ISBN 13
9783658410407
Item weight
524 grams
Dimensions
240x168x15 mm

AHA-BUCH GmbH

Einbeck, Germany

5-star seller

AbeBooks seller since August 14, 2006

Shipping rates from Germany to U.S.A.

Item7 to 10 business days5 to 7 business days
First itemUS$ 39.06US$ 50.22
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AHA-BUCH GmbH

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Einbeck, Germany 37574